Scope follow mode#
Activates or deactivates the scope follow mode of the probe station.
Description#
If the scope follow mode is active, the microscope follows the chuck movement so that the camera keeps showing the same position on the wafer while the chuck moves. This command needs hardware support by the probe station (motorized scope).
Input parameters#
| Parameter | Description |
|---|---|
| Probe station | The probe station whose scope follow mode shall be set. |
| Follow mode active | Check to activate the scope follow mode, uncheck to deactivate it. |
Output parameters#
This test does not store output parameters.
Supported devices#
All probe stations with a motorized scope that supports the follow mode,
e.g. MPI SENTIO based probe stations (SENTIO 2.8.1 or later, remote command
vis:enable_follow_mode).
Example#
Select the probe station and check "Follow mode active" to make the scope follow the chuck during subsequent chuck movements.