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Chuck move#

A test that can used to move a chuck of a probe station in X and Y direction.

Description#

The test can be used to move the chuck of a probe station in X and/or Y direction. Moves chuck xy relatively to a reference point. If current chuck height is above separation height it moves to separation before and keeping at separation height after movement. The command support thermal XY factor if activated in the probe station software. The conditions include “Thermal or lateral compensation enable” and “Thermal factor already been calculated”. The new XY movement distance will be multiplied with thermal XY factor.

Input parameters#

The test requires to select a probe station, added in the device manager.

Parameter Description
X-direction Defines the X position. Can be entered as fixed value or using a variable from another test. Units either set to millimeter or micrometer.
Y-direction Defines the Y position. Can be entered as fixed value or using a variable from another test. Units either set to millimeter or micrometer.
Relative movement Defines if the movement is relative to the current chuck position or referring to the probe station origin (=zero position).

Output parameters#

The test does not provide output parameters.

Supported devices#

The following devices are supported by this test:

  • MPI SENTIO Software Suite
  • Accretech UF200

Example#

Hardware setup:

Connect a supported wafer prober to the computer running Measmatic over TCP/IP, GPIB or RS232. 

flowchart LR
    A(Measmatic) o---o |TCP/IP, 
    GPIB or 
    RS232| B(Wafer prober)

In the device manager add the wafer prober to the current test site configuration. Change the name, the IP address in the device properties of the device. If needed, increase the communication timeout for the probe station device.