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Chuck load#

A test that can be used to load or unload a chuck inside a probe station.

Description#

The test can be used to unload or load a chuck. By selecting the station "Front", the chuck will be unloaded to the front door for manual (un)loading a wafer. By selecting the station "Center", the chuck will be loaded automatically to the probing center. This command automatically activates the vacuum check of the probe station before starting the loading process.

Input parameters#

The test requires to select a probe station, added in the device manager.

Parameter Description
Load position Selected loading position (Front or Center) defines the target position of the chuck.

Output parameters#

The test does not provide output parameters.

Supported devices#

The following devices are supported by this test:

  • MPI SENTIO Software Suite

Example#

Hardware setup:

Connect a wafer prober to the computer running Measmatic over TCP/IP, GPIB or RS232. 

flowchart LR
    A(Measmatic) o---o |TCP/IP, 
    GPIB or 
    RS232| B(Wafer prober)

In the device manager add the wafer prober to the current test site configuration. Change the name, the IP address in the device properties of the device. If needed, increase the communication timeout for the probe station device.