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Get chuck temperature#

A test that can be used to retrieve the current chuck temperature.

Description#

Retrieves the current chuck temperature of a probe station thermal chuck.

Input parameters#

The test requires to select a probe station, added in the device manager.

Output parameters#

Parameter Description
Temperature Current chuck temperature

Supported devices#

The following devices are supported by this test:

  • MPI SENTIO Software Suite
  • Accretech UF200
  • Velox Software Suite (FormFactor Inc.)
  • ERS Thermal Chuck Controller

Example#

Hardware setup:

Connect a supported Waferprober to the computer running Measmatic over TCP/IP, GPIB or RS232. 

flowchart LR
    A(Measmatic) o---o |TCP/IP, 
    GPIB or 
    RS232| B(Waferprober) o---o |RS232| C(Thermal Chuck Controller)
    A o---o |alternatively:
    direct setup
    via RS232| C

In the device manager add the Waferprober to the current test site configuration. Change the name, the IP address in the device properties of the device. If needed, increase the communication timeout for the probe station device.

The Thermal chuck controller needs to be connected to the selected probe station and activated.