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Set chuck temperature#

A test that can be used to set the target chuck temperature.

Description#

Defines the chuck temperature set point of a probe station thermal chuck. Depending on the thermal offset, it might be required to move the chuck to lift height to avoid damages due to thermal expansion. If moving chuck to lift height is required and chuck is not lifted, an error occurs.

Input parameters#

The test requires to select a probe station, added in the device manager.

Parameter Description
Target temperature Defines the target temperature of the thermal chuck. Can be typed in directly or using a variable from a previous test.
Wait for temperature If activated, the test will check the current chuck temperature until the target temperature has been reached.
Set safe temperature at the end Defines if a user defined safe temperature is executed once after test plan is finished.
Safe temperature Defines the safe temperature to be set after the test has been finished. Can be typed in directly or using a variable from a previous test.

Output parameters#

The test does not provide output parameters.

Supported devices#

The following devices are supported by this test:

  • MPI SENTIO Software Suite
  • Accretech UF200
  • ERS Thermal Chuck Controller

Example#

Hardware setup:

Connect a supported Waferprober to the computer running Measmatic over TCP/IP, GPIB or RS232. 

flowchart LR
    A(Measmatic) o---o |TCP/IP, 
    GPIB or 
    RS232| B(Waferprober) o---o |RS232| C(Thermal Chuck Controller)
    A o---o |alternatively:
    direct setup
    via RS232| C

In the device manager add the Waferprober to the current test site configuration. Change the name, the IP address in the device properties of the device. If needed, increase the communication timeout for the probe station device.

The Thermal chuck controller needs to be connected to the selected probe station and activated.