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Subsite stepping#

A test that can be used to step inside a die/site and execute all child tests until the end of route is reached.

Description#

Steps to the specified subsite of the current die in the stepping route. If the target subsite is not routable, an error occurs. Executable only if routing is active and the currently active die is part of the route.

Input parameters#

The test requires to select a probe station, added in the device manager.

Parameter Description
Stepping mode All subsites = Steps trough all active/enabled subsites at the current die location.
List of subsites = Iterates through a given list of subsites identified by their index number. In this mode, the enabled/disabled status on the probe station wafer map is ignored.
Range of subsites = Iterates through a given range of subsites identified by their index number. In this mode, the enabled/disabled status on the probe station wafer map is ignored.
Comma separated list of subsite indexes Definition of the list of subsites mode. Index values can be entered manually (comma-separated) or selected using an existing Measmatic variable from a previous test.
First subsite Defines the first subsite of the Range of subsites mode.
Last subsite Defines the last subsite of the Range of subsites mode.
Automatically move chuck to contact Moves the chuck to contact automatically after each stepping movement.

Output parameters#

The test does not provide output parameters.

Supported devices#

The following devices are supported by this test:

  • MPI SENTIO Software Suite

Example#

Hardware setup:

Connect a supported Waferprober to the computer running Measmatic over TCP/IP, GPIB or RS232. 

flowchart LR
    A(Measmatic) o---o |TCP/IP, 
    GPIB or 
    RS232| B(Waferprober)

In the device manager add the Waferprober to the current test site configuration. Change the name, the IP address in the device properties of the device. If needed, increase the communication timeout for the probe station device.

Measmatic setup: or

  1. Add a Site Stepping test to the test sequence by dragging and dropping a Site Stepping test from the test picker into the test sequence. Set the Probe station in the Site Stepping test to be the Probe station added in the device manager. Enable Automatically move chuck to contact .

  2. Add a Subsite Stepping test into the Site Stepping loop. Set the Probe station in the Site Stepping test to be the Probe station added in the device manager. Select Subsite Stepping mode (all, list range) and add the needed index information. Enable Automatically move chuck to contact .

  3. Add a measurement test into the Subsite Stepping loop. Set the Test output parameters and select a fail bin criteria. In the Example a Demo Data generator creates float numbers between 0 and 100 with a test pass criteria of a result between 25 and 75.

  4. Add Set bin into the Subsite Stepping loop. Set the Probe station in the Site Stepping test to be the Probe station added in the device manager.

  5. Execute the test sequence by pressing the Run all tests button.

See also:

Site Stepping Set Bin