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Move Chuck Site#

A test that can be used to change the active chuck site at a probe station.

Description#

Moves chuck to the last active position of the selected chuck site. If no last active position is available (first move to selected site after system startup) target position is the home position of the site. Need hardware support in AuxRight½ and AuxLeft½.

Input parameters#

The test requires to select a probe station, added in the device manager.

Parameter Description
Site Select a pre-defined site from the dropdown list. Chuck transfers from current site to the selected site. The transfer is only able for sites, not for working areas (e.g. Probing/Offaxis)

Output parameters#

The test does not provide output parameters.

Supported devices#

The following devices are supported by this test:

  • MPI SENTIO Software Suite

Example#

Hardware setup:

Connect a supported Waferprober to the computer running Measmatic over TCP/IP, GPIB or RS232. 

flowchart LR
    A(Measmatic) o---o |TCP/IP, 
    GPIB or 
    RS232| B(Waferprober)

In the device manager add the Waferprober to the current test site configuration. Change the name, the IP address in the device properties of the device. If needed, increase the communication timeout for the probe station device.