SentioProber
The SENTIO prober class allows you to control a SENTIO compatible probe station. This is an extension to the Prober interface that adds commands required for using SENTIO specific SiPh commands.
This class inherits from Prober.
method get_siph_positioner(location_string: str)
Gets the SiPh positioner at the specified location.
Parameters
| Name |
Description |
| location_string |
The location of the positioner. (East, West, North, South) |
Returns
Example
probe_station = measmatic.GetDevice('device-probe-station')
siph_positioner_east = probe_station.get_siph_positioner("East")
method get_siph_positioner_by_int(location_int: int)
Gets the SiPh positioner at the specified location.
Parameters
| Name |
Description |
| location_int |
An integer value representing the location of the positioner. (East = 1, West = 2, North = 3, South = 4) |
Returns
Example
probe_station = measmatic.GetDevice('device-probe-station')
siph_positioner_west = probe_station.get_siph_positioner_by_int(2)
method has_siph_positioner_int(location: int)
Checks whether a SiPh positioner is installed at a certain probe position.
Parameters
| Name |
Description |
| location |
An integer value representing the location of the positioner. (East = 1, West = 2, North = 3, South = 4) |
Returns
| Type |
Description |
| bool |
True if a SiPh positioner is installed and set up at the given location, otherwise False . |
Example
probe_station = measmatic.GetDevice('device-probe-station')
has_siph_positioner = probe_station.has_siph_positioner_int(1)
method has_siph_positioner_string(location: str)
Checks whether a SiPh positioner is installed at a certain probe position.
Parameters
| Name |
Description |
| location |
A string representing the position of the probe. ("East", "West", "North", "South") |
Returns
| Type |
Description |
| bool |
True if a SiPh positioner is installed and set up at the given location, otherwise False . |
Example
probe_station = measmatic.GetDevice('device-probe-station')
has_siph_positioner = probe_station.has_siph_positioner_string('East')
method move_all_siph_positioner_hover()
Move all motorized Siph positioner to their hover height. The hover height is a height close to the wafer contact height but below the separation height. Chuck x-y motion speeds are limited when probes are at hover height and it is not recommended to move the chuck across large distances.(Hover height is usually ~50 µm above contact)
Example
probe_station = measmatic.GetDevice('device-probe-station')
probe_station.move_all_siph_positioner_hover()
method move_all_siph_positioner_separation()
Move all motorized Siph positioner to their separation height. The separation height is a probe station specific height set up to allow safe chuck x-y motion across the entire wafer. (Usually 250 µm above contact)
Example
probe_station = measmatic.GetDevice('device-probe-station')
probe_station.move_all_siph_positioner_separation()