SentioProber
The SENTIO prober class allows you to control a SENTIO compatible probe station. This is an extension to the Prober interface that adds commands required for using SENTIO specific SiPh commands.
This class inherits from Prober.
method get_siph_positioner(location_string: str)
Gets the SiPh positioner at the specified location.
Parameters
| Name |
Description |
| location_string |
The location of the positioner. (East, West, North, South) |
Returns
Example
probe_station = measmatic.GetDevice('device-probe-station')
siph_positioner_east = probe_station.get_siph_positioner("East")
method get_siph_positioner_by_int(location_int: int)
Gets the SiPh positioner at the specified location.
Parameters
| Name |
Description |
| location_int |
An integer value representing the location of the positioner. (East = 1, West = 2, North = 3, South = 4) |
Returns
Example
probe_station = measmatic.GetDevice('device-probe-station')
siph_positioner_west = probe_station.get_siph_positioner_by_int(2)
method has_siph_positioner_int(location: int)
Checks whether a SiPh positioner is installed at a certain probe position.
Parameters
| Name |
Description |
| location |
An integer value representing the location of the positioner. (East = 1, West = 2, North = 3, South = 4) |
Returns
| Type |
Description |
| bool |
True if a SiPh positioner is installed and set up at the given location, otherwise False . |
Example
probe_station = measmatic.GetDevice('device-probe-station')
has_siph_positioner = probe_station.has_siph_positioner_int(1)
method has_siph_positioner_string(location: str)
Checks whether a SiPh positioner is installed at a certain probe position.
Parameters
| Name |
Description |
| location |
A string representing the position of the probe. ("East", "West", "North", "South") |
Returns
| Type |
Description |
| bool |
True if a SiPh positioner is installed and set up at the given location, otherwise False . |
Example
probe_station = measmatic.GetDevice('device-probe-station')
has_siph_positioner = probe_station.has_siph_positioner_string('East')
method lift_pneumatic_probe_group(valve_group: str)
Lifts all pneumatic probes of the given valve group.
Parameters
| Name |
Description |
| valve_group |
The valve group that should be lifted. |
Example
probe_station = measmatic.GetDevice('device-probe-station')
probe_station.lift_pneumatic_probe_group("v1")
method lower_pneumatic_probe_group(valve_group: str)
Lowers all pneumatic probes of the given valve group.
Parameters
| Name |
Description |
| valve_group |
The valve group that should be lowered. |
Example
probe_station = measmatic.GetDevice('device-probe-station')
probe_station.lower_pneumatic_probe_group("v1")
method move_all_siph_positioner_hover()
Move all motorized Siph positioner to their hover height. The hover height is a height close to the wafer contact height but below the separation height. Chuck x-y motion speeds are limited when probes are at hover height and it is not recommended to move the chuck across large distances.(Hover height is usually ~50 µm above contact)
Example
probe_station = measmatic.GetDevice('device-probe-station')
probe_station.move_all_siph_positioner_hover()
method move_all_siph_positioner_separation()
Move all motorized Siph positioner to their separation height. The separation height is a probe station specific height set up to allow safe chuck x-y motion across the entire wafer. (Usually 250 µm above contact)
Example
probe_station = measmatic.GetDevice('device-probe-station')
probe_station.move_all_siph_positioner_separation()
method query_and_check_error(request: str)
Sends a command to SENTIO and verifies the status code form SENTIO in the response. In case of an error, an exception is raised. Otherwise, the response from SENTIO is split by commas and returned as an array ot strings.
Parameters
| Name |
Description |
| request |
The SENTIO remote command to send. |
Returns
| Type |
Description |
| str |
The response of SENTIO split by commas. |
Example
sentio_probe_station = measmatic.GetDevice('device-sentio-probe-station')
sentio_probe_station.query_and_check_error("move_chuck_contact")